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XY scan range 100 μm (tolerance +/- 10%) Z range 15 μm (tolerance +/- 10%) XY drive resolution 24 bit control – 0.06 Angströms Z drive resolution 24 bit control – 0.006 Angströms Ultra low noise HV Typ : <0.01 mV RMS 6 DAC Outputs 6 D/A Converters – 24 bit (XYZ drive, bias, aux…