RC2 ELLIPSOMETER
Dual Rotating Compensator Ellipsometer (RCE) 210-1000 nm 210-1690 nm 210-2500 nm 800-1065 CCD sensors Auto angle 45-90deg Auto z 0.05 seconds
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VASE ELLIPSOMETER
Rotating Analyzer Ellipsometry (RAE) automated monochromator 240-2500 nm 193-240 nm 2500-4000 nm (requires liquid nitrogen cooling) Auto angle 15-90deg with Accuracy: 0.01 °
M-2000 ELLIPSOMETER
Rotating Compensator Ellipsometer (RCE) 193-1000 nm 193-1000 nm 193-1690 nm 190-500 CCD sensors Auto angle 45-90deg Auto z 0.05 seconds
ALPHA 2.0 ELLIPSOMETER
Dual-Rotation, 400-1000 nm 190 Detector CCD Manual Angles of Incidence 65°, 70°, 75° or 90° (straight-through)