Software

Software

The proprietary software Koala Acquisition & Analysis is the master software of the DHM instrument by Lyncée Tec.

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Reflection DHM

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Unrivalled acquisition speed In-situ process characterization Sub-nanometric vertical resolution at any magnification

Transmission DHM

Transmission DHM

Reflection DHM measures the reflected wavefront from the sample, i. e. the surface topography in the case of a purely reflecting sample